This paper analyzes spillover effect of R&D total factor productivity and its geographical distance characteristic by means of SFA model and spatial panel econometric model using provincial data in China from 2002 to 2012.The results show that：China’s R&D total factor productivity shows a significant spillover effect，and with the passage of time，the spillover effect continues to strengthen，however，it keeps dwindling when increasing geographical threshold .Spillover effect of R&D total factor productivity in Eastern Region is the highest，which is followed by Central Region and Western Region. Both physical and intellectual input can significantly improve R&D total factor productivity in China，however from sub-regional perspective，physical capital cannot promote R&D total factor productivity any more in the Eastern Region，and there lacking sufficient and excellent intellectual input in the Central and Western Region.