Abstract: In the process of independent innovation, people often highly concern the technological innovation, but neglect the extreme importance of the institutional innovation. It is proposed that the industry-university-research institute collaboration building on the effective institutional innovation can realize the greater technological innovation. Based on the case study of Research Institute of Tsinghua University in Shenzhen’s (RITS’s) long-term practice, its institutional innovation for industry-university-research institute collaboration is studied, and the conclusion is that RITS has built a creative model: “integrated innovation unit” which has different functions to support and accelerate through the institutional innovation. In the promotion of science and technology entrepreneurs, RITS builds a balanced and coordinated developing system including support, technology, incubation and financing; and it produced a lot of technological innovation and commercialization. This innovative model provides a useful reference for the practice of Chinese industry-university-research institute collaboration.