A cross-province R&D production model for evaluating the relative efficiency of R&D activities is constructed. Stochastic frontier function models are applied to the panel data of 29 provinces in 1998-2005. The means of efficiency scores for research and develop activities are about 06. The east region gets the highest score of efficiency, and the west region has relative low efficiency. It is also found that foreign direct investment, international trade, and human capital have significantly positive effects on the R&D efficiency; promotion of human capital and competitiveness can improve the positive effects of foreign direct investment and international trade.